UNIT UFC-8165 mass flow controller designed for silane (SiH₄) gas, with a flow capacity of 400 SCCM (400 cc/min).

This precision gas control component is used in semiconductor manufacturing and process gas delivery systems. Suitable for replacement, maintenance or spare-parts inventory in compatible equipment.

Please verify the model, gas compatibility, connections and calibration requirements before purchase.

3. ITEM SPECIFICS

• Brand: UNIT Instruments

• Model: UFC-8165

• Type: Mass Flow Controller (MFC)

• Gas Type: Silane (SiH₄)

• Flow Range: 400 SCCM (400 cc/min)