Low Dielectric Constant Materials for Ic Applications, Hardcover by Ho, Paul S.; Leu, Jihperng; Lee, Wei William, ISBN 3540678190, ISBN-13 9783540678199, Like New Used, Free shipping in the US
Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. Th appeals to materials reserachers, electrical engineers and advanced students.