Leybold WSU501/D65B RUVAC Roots Booster TRIVAC Vacuum Pump System | 208V 3-Phase 60Hz | 18.2A | Semiconductor | Used | VSS

Model Number: WSU501/D65B  (System P/N: 308130L981170145)

Condition: Used

Product Description

The Leybold Pumping Systems WSU501/D65B is a complete two-stage compound vacuum pumping assembly consisting of a RUVAC WSU501 Roots lobe blower operating in series with a TRIVAC D65B two-stage oil-sealed rotary vane backing pump, factory-integrated on a common steel base frame. The RUVAC WSU501 Roots blower provides high-throughput vacuum boosting at approximately 500 m³/h (50 Hz) or 590 m³/h (60 Hz), while the TRIVAC D65B backing pump achieves an ultimate pressure below 1×10⁻⁴ mbar with a 65 m³/h swept volume rate, enabling rapid evacuation of large-volume chambers and fore-line plumbing from atmosphere to the fore-line pressures required by turbomolecular pump inlet conditions. The system is configured for 208V, 3-phase, 60 Hz operation at 18.2 A running current, assembled by Leybold Vacuum Products Inc. in Export, Pennsylvania in April 1998 (P/N: 308130L981170145). This assembly is offered in used, pulled condition from a semiconductor tool service environment and ships as a palletized freight item.


Part Compatibility

  • ASML PAS 5500 Series Deep UV Lithography Tool Rough Vacuum and Fore-Line Pump Systems

  • Applied Materials Centura, Endura, and Producer Platform CVD/PVD Process Chamber Roughing Systems

  • Lam Research 2300 Series and Vector Etch Tool Fore-Line and Load Lock Vacuum Pump Systems


Part Specification


Manufacturer

Leybold Vacuum Products Inc. (Leybold Pumping Systems)

System P/N

308130L981170145

System Type

RUVAC WSU501 Roots Booster / TRIVAC D65B Backing Pump Assembly

RUVAC Model

WSU501 (Roots Lobe Blower)

RUVAC Pumping Speed

~500 m³/h (50 Hz) / ~590 m³/h (60 Hz)

TRIVAC Model

D65B (Two-Stage Oil-Sealed Rotary Vane Pump)

TRIVAC Pumping Speed

65 m³/h

TRIVAC Ultimate Pressure

<1×10⁻⁴ mbar

Gas Ballast

Yes (TRIVAC D65B)

Input Voltage

208V

Phase

3-Phase

Frequency

60 Hz

Running Current

18.2 A

Date of Assembly

April 1998

Configuration

Base-Mounted Integrated Pump System on Pallet

Condition

Used


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