The Applied Materials 0190-34219 (Aera Model: PI-982) is a high-performance Digital Mass Flow Controller engineered for precision gas delivery in advanced semiconductor fabrication. This "Pressure Insensitive" model integrates traditional thermal flow architecture with an internal pressure sensor, eliminating the need for external pressure regulators and mounting blocks in the gas panel.
As seen in the manufacturer labels, this specific unit is calibrated for Nitrogen (N2) gas with an exceptionally high full-scale range of 100,000 SCCM (100 SLM). It is designed for 24/7 reliability in cleanroom environments, making it a critical spare for Centura, Endura, and Vantage platforms.