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HORIBA STEC GP-Z104RF-E MASS FLOW CONTROLLER USED GAS He RANGE 13.3kPa 20SCCMProduct Description: 

The HORIBA STEC GP-Z104RF-E is a high-performance auto pressure regulator and mass flow controller designed for precise gas delivery in semiconductor, thin film, and advanced industrial process applications. The Z10 Series is well known for its superior pressure insensitivity, rapid response times, and exceptional stability, making it a staple in OEM tools and integrated gas systems (IGS).

This model is typically used in high-purity process gas delivery systems where maintaining consistent pressure and flow accuracy is critical for process repeatability and yield.

Model Number: 
GP-Z104RF-E
Condition: Used




Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. 

For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.

Items are sold with a 30-Day Satisfaction Guarantee

General Shipping Terms:

For International Orders:
It is Vision Semiconductor Solution policy to verify the end-use and end-user in all sales of our products, related technology and
software to ensure compliance with applicable U.S. export control laws and regulations.

BEFORE YOUR ORDER CAN BE SHIPPED, this form must be completed and signed by a responsible principal of your company and returned to your point-of-contact.

Same Day Shipping Policy

For same day shipping you must contact us via eBay messaging before 11:00 am Central Standard Time and we will do our best to meet your shipping request.
Additional Fee for Same Day Shipping

Same day shipping may not be available for freight items or if VSS is experiencing a large volume of outgoing orders.

Same day shipping is NOT available for international sales due to export requirements.

Boxed Shipment Details

Domestic Shipments: Free shipping is offered for some items, VSS reserves the right to ship using economical shipping method.

International Shipments: Carrier rates are calculated by package dimensions and shipping location. Buyer is responsible for duties, taxes (VAT), or other import fees.

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Freight Shipment Details

Freight shipments are commercial Dock to Dock deliveries; residential addresses are curbside service only, buyer is responsible for moving the product from the truck lift gate to their home.


Additional Fee for Custom Crate/Pallet/Barrier Bagging: Packing rates may be added to both domestic and international shipments, please contact for current rates.

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For freight items offering free US Domestic shipping (residential delivery excluded), VSS reserves the right to ship using economical method including ocean shipping service for international purchases.