3 units together for sale as 1 lot for best value/

These were 

Lasertec Corp Laser microscope ,AMP Unit,  1LM21H

CE compliant

Motion controller, Semprex model 17-2351.20

Lasertec Corp Z axis controller. 1ZC1

All 3 units were togerther in AUTO RETICLE MACRO INSPECTION 

OEM equipment used on was Brooks