Unit Instruments UFC‑8100 — Datasheet summary

The UFC‑8100 is a high‑flow, elastomer‑sealed mass flow controller in the Unit Instruments / Celerity 8100 family designed as a semiconductor‑grade, drop‑in replacement MFC with MultiFlo technology, multiple I/O options, and a standard high‑flow mechanical footprint.

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Key specifications (typical datasheet values)

Attribute	Typical value
Model family	UFC‑8100 (8100 Series High‑Flow MFC).
Full‑scale flow options	Ranges from low SCCM up to several SLPM; common high‑flow SKUs shown in vendor listings.
Calibration conditions	Gas‑specific factory calibration (standard STP reference noted in manual).
Accuracy / repeatability	Datasheet lists high repeatability; family claims better than 0.15% FS repeatability and low drift.
I/O and interfaces	Analog and digital options: analog 0–5 V setpoint/readback; RS‑485, DeviceNet, PROFIBUS available on some SKUs.
Connector type	Card‑edge or D‑sub variants shown in listings; confirm on unit label.
Wetted materials and sealing	Elastomer sealed for non‑ultraclean gases; 32 μin Ra finish for non‑corrosive processes.
Mechanical footprint	High‑flow MFC footprint; example dimensions in listings ~125 × 143 × 38 mm and weight ≈1 kg.
Typical applications	Semiconductor and process gas control where high flow and low drift are required.

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Datasheet items you should verify on your exact SKU

• Full‑scale flow and calibration gas — the controller is gas‑specific; the datasheet gives the FS, calibration gas, and conversion factors.
• Accuracy, linearity, and repeatability tables — these are listed per FS range in the datasheet.
• Flow vs ΔP curves and maximum inlet pressure — required to confirm controllability at your system pressures.
• Electrical pinout and connector option — card‑edge vs D‑sub pinouts differ by SKU; use the manual wiring diagram before connecting.

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