ASM AFC‑260 — Datasheet summary (200 SCCM, N₂)

At‑a‑glance technical table

Attribute Value / note
Model family AFC‑260 (AFC‑261 family referenced in manual).
Configured full scale 200 SCCM (unit shown in listings as 200 SCCM, N₂).
Calibration gas Nitrogen (N₂) — unit sold/calibrated to N₂ in listings.
Valve / control Interchangeable control valve; removable for cleaning/maintenance (feature called out in the AFC‑260/AFC‑261 manual).
Typical fittings / body Semiconductor/lab MFC footprint; vendor photos show standard process fittings (confirm exact thread type on your unit).
Electrical I/O Manufacturer manual required for exact pinout and signal types (listings do not publish full pinout).
Condition / availability New and surplus/used units available from distributors and marketplaces; Radwell and surplus sellers list AFC‑260 units.

What the official datasheet / manual contains (and why you need it)

The AFC‑260 user manual and datasheet include the definitive values you’ll need for safe installation and integration: