Achieves < 7.5 × 10⁻⁵ Torr ultimate pressure, ideal for demanding applications.
Pumps from atmosphere without needing a backing pump.
Oil-free, maintenance-free operation reduces contamination risk.
Unique mechanism ensures long-term reliability and efficiency.
Energy-efficient design cuts operational expenses.
Reduced maintenance needs save downtime and service costs.
Built-in End User Controller (EUC) for standalone or networked operation.
Remote monitoring & fab-wide integration for Industry 4.0 compatibility.
Small footprint fits easily into tight production or lab environments.
| Peak Speed | 170 m3h-1 / 105 ft3min-1 / 2,835 lmin-1 |
| Ultimate Vacuum | < 1 x 104 mbar / < 7.5 x 10-5 / < 1 x 10-2 Pa Torr |
| Warm up time (to nominal performance) | 30 min |
| Inlet Flange | ISO63 |
| Outlet flange | NW25 |
| Noise | < 59 dB(A) |
| Minimum cooling water flow rate | 2 lmin-1 |
| Cooling water temperature | 15 - 35°C |
| Nitrogen supply interface | 1/4 in (6.5 mm) tube |
| Nitrogen supply pressure | 3 x 105 - 7 x 105 pa |
| Minimum nitrogen purity | 99.95% |
| Electrical supply | 400 V, 50/60 Hz 3-phase |
| Power at ultimate | 1.4 kW |
| Rated motor power | 3.0 kW |
| TIM | None |
| Weight | 43.5 kg |
We usually transport goods for you by air. It usually takes 5 to 7 days.
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