The Alcatel Adixen ADP ADS Series Two Dry Pump design brings high benefits for applications where cleanliness and reliability are key features. The Series Two family covers a large range of vacuum requirements with 4 models. These models can be chosen in LM versions for clean applications, P versions for light/medium applications, and H for harsh applications. Many major manufacturers from the semi-conductor industry have already selected this product. This choice allows them to reduce unscheduled downtime and overall running cost and increase profitability features and benefits.
The Alcatel Adixen ADP ADS Series Two Dry Pumps were designed to minimize potential residue deposits. This process is achieved by internal gas limitation, diluting the gas on each pump stage with N2, and adjusting the temperature in order to control gas condensation.
The Alcatel Adixen ADP ADS Dry Vacuum Pumps consist of 5 roots type stages (three stages of low pressure, and two of high pressure), and the two rotors that rotate without touching each other.
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