EBARA 50X20 Semiconductor Dry Vacuum Pump Package

Brand: EBARA

Model: 50X20

Type: Dry Vacuum Pump / Blower Package

Pump Family: UERR Series Multi-Stage Roots Dry Pump

Application: Semiconductor / industrial vacuum process equipment

Specifications:

Pumping Speed: Approx. 127 CFM / 3,588 L/min

Ultimate Pressure: Approx. 4 mTorr / 0.004 Torr

Inlet Flange: NW50 / KF50

Exhaust Flange: NW40 / KF40

Rotational Speed: 3,460 RPM

Power Requirement: 208/240V, 50/60Hz, 3 Phase

Current: Approx. 19A

Motor Power: Approx. 6.4 kW

The shipping charge shown is an estimate. Please contact us through eBay Messages before purchasing for an exact freight quote based on your delivery location.

Estimated Bare Weight: Approx. 722 lb / 327 kg

Approx. Dimensions: 30 in W x 18 in D x 38 in 

After-Sales Support: If service is ever needed, repair and rebuild support may be available at a preferred customer rate. 

About DryVac co.

For over 33 years, DryVac has specialized in turbo, vane, piston, cryo, scroll, blower, vacuum pump systems. Every item is professionally inspected, honestly described, securely packaged, and shipped with care. Our goal is simple: provide reliable equipment and outstanding customer service that you can trust.