Stover, Harry L.; editor. SELECTED PAPERS ON MICROLITHOGRAPHY. SPIE Milestone Series Volume MS 55. Bellingham, Washington: SPIE Optical Engineering Press, (1992). Quarto, 11 inches high by 8-1/2 inches wide. Softcover, bound in printed light blue wraps. The corners of the covers are lightly creased and there is a tear to the tail of the spine. An early ink price has been partially erased from the top corner of the front cover. 676 pages, with textual illustrations and diagrams. Very good.
First edition. SCARCE.
SPIE is the Society of Photo-Optical Instrumentation Engineers. The Mileston Series under general editor Brian J. Thompson is "A reprint collection of outstanding papers from the world literature on optical and optoelectronic science, engineering, and technology".
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