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NGMXMBSS4

WAFERGUARD MAX B-Plus

Superior particulate filtration for high-temperature, ultrapure gas applications.

Designed for high-temperature TEOS and high-k applications up to 200°C (392°F)
Overall design (148 mm [5.82"]) is a drop-in replacement for similar filters
The compact size fits many existing delivery systems and provides design flexibility and versatility
Special baking enables rapid gas delivery startup
Low differential pressure provides stable and improved material delivery

Materials	Membrane	PTFE
	Support	PFA
	Housing	316L stainless steel
Removal particle rating	≥0.0015 µm
Particle retention	≥99.9999999% @ 25°C (77°F)
Initial downstream cleanliness	≤0.03 particles/liter greater than 0.01 μm
Internal surface finish	≤7 μin Ra (Ra <0.17 μm)
Connections	1/2" gasket seal male (VCR® compatible)
Operating conditions	Maximum operating pressure	0.99 MPa (9.9 bar; 143.15 psig) @ 0° to 200°C (0° to 392°F)
	Maximum forward differential pressure	0.70 MPa (7 bar; 101.5 psid) @ 0° to 40°C (0° to 104°F)
		0.08 MPa (0.8 bar; 11.6 psid) @ 200°C (392°F)
	Maximum operating temperature	200°C (392°F) in inert gases
Helium leak rating	<1 x 10-10 Pa•m3/sec
Flow rating	Refer to performance data