1,  Robot type: EQUIPE TECHNOLOGIES ATM-1764

2, Pre-aligner type: NO

3,Software version: SHS4.6b

4, Transfer station: 2 Sender Station, 2 Receiver Station

5,Cooling station: 1 Cooling Station

6, Heater chamber size: 340mmx260mm (ID)

7, lamp type: Halogen lamp 1500W  total 27 pcs, (Bottom 13, top 12, left side 1, right side 1),  6 zone lamp control (top 3 zone, bottom 3)

8, CPU at ILC Rack: NO

9, MFC type and flow

  * N2 F201C-VA-88-V  15.0 slm

  * O2 F201C-VA-88-V  10.0 slm

  * H2 F-201C-UA-88-V  5.0 slm

  * NH3               10slm

  * Ar F201C-VA-88-V   10.0 slm

10, TC  wafer: NO

11, Tray: Yes