Brooks 5850i Mass Flow Controller NITROGEN 500 SCCM ⚡️🇺🇸 SHIP+WARRANTY. Removed from fully functioning surplus equipment, I have these for AIR, NITROGEN, CO2 and Oxygen. Gaurenteed, if any issues within 90 days will exchange for free replacement.
Units can be used for other gasses entering correction factor table information for different gasses using provided equation
The Brooks Model 5850i Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5850i consists of
three basic units: a flow sensor, a control valve and an integral electronic
control system. This combination produces a stable gas flow, which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:
Fast Response Control permits rapid gas settling times with little or no
over/undershoot. Refer to Figure 1-1.
Soft Start provides a flow ramping function which slows down the
introduction of the process gas for those processes which cannot tolerate
rapid flow transition. Refer to Section 2-7 and Figure 1-2.
Valve Override permits the user to fully open and close the control valve
independent of the setpoint (command) setting. Refer to Section 2-6.
Setpoint (Command) permits the user to program the mass flow controller
with an external 0-5 Vdc or 4-20 mAdc signal. Refer to Section 2-6.
Low Command Valve Inhibit (Auto Shutoff) prevents the valve from
opening whenever the setpoint is less than 2% of full scale.
Removable Cleanable Sensor permits the user to clean or replace the
sensor. Refer to Section 4-4.
Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to -0.7 Vdc and +6.8 Vdc on the voltage
signal output and 0 to 26 mA on the current output.
Features
Benefits
Applications