Brooks 5850i Mass Flow Controller NITROGEN 500 SCCM ⚡️🇺🇸 SHIP+WARRANTY. Removed from fully functioning surplus equipment, I have these for AIR, NITROGEN, CO2 and Oxygen. Gaurenteed, if any issues within 90 days will exchange for free replacement.



Units can be used for other gasses entering correction factor table information for different gasses using provided equation


The Brooks Model 5850i Mass Flow Controller is used widely in the

Semiconductor Industry as well as many others, where manual, electronic

or computer controlled gas handling occurs. The Model 5850i consists of

three basic units: a flow sensor, a control valve and an integral electronic

control system. This combination produces a stable gas flow, which

eliminates the need to continuously monitor and readjust gas pressures.

Standard features include:

Fast Response Control permits rapid gas settling times with little or no

over/undershoot. Refer to Figure 1-1.

Soft Start provides a flow ramping function which slows down the

introduction of the process gas for those processes which cannot tolerate

rapid flow transition. Refer to Section 2-7 and Figure 1-2.

Valve Override permits the user to fully open and close the control valve

independent of the setpoint (command) setting. Refer to Section 2-6.

Setpoint (Command) permits the user to program the mass flow controller

with an external 0-5 Vdc or 4-20 mAdc signal. Refer to Section 2-6.

Low Command Valve Inhibit (Auto Shutoff) prevents the valve from

opening whenever the setpoint is less than 2% of full scale.

Removable Cleanable Sensor permits the user to clean or replace the

sensor. Refer to Section 4-4.

Output Limiting prevents possible damage to delicate data acquisition

devices by limiting the output to -0.7 Vdc and +6.8 Vdc on the voltage

signal output and 0 to 26 mA on the current output.

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