Removed from a Daihen RF Power Generator — Payton Planar 2500W Transformer Onboard
This is a genuine Daihen Corporation RG-1268 printed circuit board assembly, revision 02, made in Japan and removed from a working Daihen RF power generator. Daihen RF generators are widely used to drive semiconductor process chambers such as plasma etch, PECVD, and sputtering/PVD tools, and power stage boards like this one are common replacement parts for keeping those generators running.
The board is built around a Payton Planar planar transformer (P.N. 54039 Rev.01, rated 2500W) as the main power conversion element, paired with a second Payton Planar planar inductor (P.N. 54081 Rev.00, rated 2×2µH at 72A) for output filtering. The high-current switching side of the board is populated with four TO-247 power MOSFETs (Q1–Q4, IXYS-branded), a bank of high-voltage film capacitors, and two ferrite-core wound chokes (marked 12-1262A and 12-1261A). The board is labeled with a "DHP 10T S 94V-0" substrate rating and carries a "TF01" transformer designation sticker. Full visible component detail is listed in the table below.
This was removed from a working environment as a functional pull; it was not bench-tested in isolation prior to listing. A solid option for a spares kit, a repair project on a Daihen RF generator, or as a reference board for RF generator service work.
| Manufacturer | Daihen Corporation |
| Model | RG-1268 |
| Revision | 02 |
| Country of Manufacture | Made in Japan |
| Source Equipment | Daihen RF power generator (semiconductor process equipment) |
| Main Transformer | Payton Planar, P.N. 54039 Rev.01, 2500W, USA Patent 5,010,314 |
| Planar Inductor | Payton Planar, P.N. 54081 Rev.00, 2×2µH & 72A |
| Substrate Rating | DHP 10T S, 94V-0 |
| Dimensions | Approx. 10.5" x 6" (measure prior to shipping quote) |
| Main Transformer | Payton Planar P.N. 54039 Rev.01, 2500W, mounted center-top of board with heatsink/shield bracket, secured by 4 screws |
| Planar Inductor (TF01) | Payton Planar P.N. 54081 Rev.00, 2×2µH & 72A, mounted right-center of board |
| Power MOSFETs | Q1, Q2, Q3, Q4 — TO-247 package, IXYS-branded, marked IXF150N50P3 / IXFZ150N50P3 / TAR228-series |
| Ferrite-Core Chokes | 2x wound ferrite toroid chokes, marked "12-1262A" (top) and "12-1261A" (bottom center), white bobbin construction |
| Film Capacitors (Left Bank) | C1–C21 — approx. 20x tan-body film capacitors in vertical stacked rows |
| Film Capacitors (Right Bank) | C22–C29 — approx. 8x tan-body film capacitors near right edge |
| Additional Capacitors | C30–C49 range labeled near Q1–Q4 switching devices |
| Zener Diodes | ZD1, ZD3, ZD4, ZD5, ZD6, ZD8, ZD9 (labeled locations) |
| Rectifier/Signal Diodes | D1–D5 (right side, near planar inductor); D6–D11 and D16, D20 (upper right and center) |
| Resistors | R1–R9 (labeled locations across board) |
| Jumpers | JP1, JP2, JP3, JP4, JP5, JP6, JP7 |
| Header Connectors | PN1, PN2, PN3, PN4, PN5 |
| Terminal Posts | TM1, TM2, TM3, TM4 |
| Board Markings | Silkscreened "RG-1268 DAIHEN Corporation", "MADE IN JAPAN", "DHP 10T S 94V-0", "TF01" label, revision "02" sticker |