Hitachi Aera Transformer FC-PAR7800C Mass Flow Controller MFC Multi-Gas 3 SLM
Manufacturer: Aera
Model: TC FC-PAR7800C
Condition: For Parts or Not Working
Manufacturer: Aera
Condition: For Parts or Not Working. Comes in non-original packaging. The flow controller is in good, physical condition with minor scuffs from previous use, but nothing that looks like it would affect functionality.
Notes: This mass flow controller was removed from a decommissioned machine. No testing was performed after removal. Last gas service unknown; top of unit marked 'SiH4' by the previous user. We cannot guarantee the condition of this MFC and are selling it AS/IS.
No manuals, cords/cables, or additional items are included if not listed or shown.
Included:
- (1) Aera TC FC-PAR7800C Precision Mass Flow Controller 3000 SCCM Range 4V Fitting
Specifications:
- Manufacturer: Aera Transformer (Hitachi Metals)
- Model: TC FC-PAR7800C
- Part No.: 11056327
- Description: Mass flow controller
- Serial Number: C150529001
- SUR Number: N/A
- Flow Range: 3000 SCCM
- Gas: MULTI -5
- SEMI Gas Number: N/A
- Calibration Gas: MULTI
- N2 Conversion Factor (N2 CF): 1.000
- Fitting: 4V
-
N2 Flow Rates:
- 100%: 2999.167 SCCM
- 80%: N/A SCCM
- 50%: 1498.784 SCCM
- 20%: N/A SCCM
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