TITLE
Brooks 5866RC1A1C4N2QA Pressure Controller RT Series 0110080432781008 500SCCM

Product Description: 

The Brooks 5866RC is a high-performance, metal-sealed pressure controller engineered for ultra-high purity (UHP) gas delivery systems. As part of the RT Series, this unit is designed to provide rapid response and superior thermal stability in semiconductor and thin-film deposition processes.

Unlike a standard flow controller, the 5866RC integrates a precision pressure sensor and a control valve into a single unit to maintain constant pressure regardless of fluctuations in flow. This specific unit is calibrated for Argon (Ar) with a 500 SCCM reference, making it ideal for maintaining stable chamber pressures or back-filling load locks in Etch, CVD, or PVD toolsets.

Model Number: 5866RC1A1C4N2QA

Condition: Used




Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. 

For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.

Items are sold with a 30-Day Satisfaction Guarantee


For International Orders:
It is Vision Semiconductor Solution policy to verify the end-use and end-user in all sales of our products, related technology and
software to ensure compliance with applicable U.S. export control laws and regulations.

BEFORE YOUR ORDER CAN BE SHIPPED, this form must be completed and signed by a responsible principal of your company and returned to your point-of-contact.


Boxed Shipment Details

Buyer is responsible for duties, taxes (VAT), or other import fees.

We cannot ship items to APO/FPO/PO Box.


Freight Shipment Details

Freight shipments are commercial Dock to Dock deliveries; residential addresses are curbside service only, buyer is responsible for moving the product from the truck lift gate to their home.


Additional Fee for Custom Crate/Pallet/Barrier Bagging: Packing rates may be added to both domestic and international shipments, please contact for current rates.

You are welcome to arrange your own collect freight transportation please contact us via eBay messaging.

   
The Brooks 5866RC is a high-performance, metal-sealed pressure controller engineered for ultra-high purity (UHP) gas delivery systems. As part of the RT Series, this unit is designed to provide rapid response and superior thermal stability in semiconductor and thin-film deposition processes. Unlike a standard flow controller, the 5866RC integrates a precision pressure sensor and a control valve into a single unit to maintain constant pressure regardless of fluctuations in flow.  This specific unit is calibrated for Argon (Ar) with a 500 SCCM reference, making it ideal for maintaining stable chamber pressures or back-filling load locks in Etch, CVD, or PVD toolsets. Freight shipments are commercial Dock to Dock deliveries; residential addresses are curbside service only, buyer is responsibl