Entrepix DSS 200 - Post CMP Wafer Scrubber For Sale
Item is in New Condition
Purchased for $450,000 and never set up
See the attached pictures and information below
Equipment Description
Entrepix
Type: Wafer Scrubber
Model Number: DSS-200
Year: April 2022
Wafer Configuration: 100mm or 150mm or 200mm
Double Side Scrubber
Through the brush chemical dispense in each brush box
I/O addressing
Upgraded drive and stepper motor controls
Windows 7 O/S
Color Touch Screen Flat Panel Display
Process parameter flexibility is maintained in a controlled and repeatable manner through system software
Factory Mutual FM4910 approved plastics utilized for major assemblies
Molded Spin Sink (SRD)
Improved DI\Chemical Dispense Module.
5-Finger Wafer Gripper Standard
Universal Lifter Tip / 100-200mm, 600,800,1000,1200 Micron thickness options
Consistent w/ Legacy consumables
220VAC UL Listed
CE marked electrical enclosure
Buyer is responsible for shipping charges from our Boston, MA location
We can quote skidding, packaging, crating, and shipping to countries overseas by boat or airplane
Please let us know if you have any questions or concerns