Entrepix DSS 200 - Post CMP Wafer Scrubber For Sale


Item is in New Condition 


Purchased for $450,000 and never set up 


See the attached pictures and information below


Equipment Description

Entrepix

Type: Wafer Scrubber

Model Number: DSS-200 

Year: April 2022

Wafer Configuration: 100mm or 150mm or 200mm

Double Side Scrubber

Through the brush chemical dispense in each brush box

I/O addressing

Upgraded drive and stepper motor controls 

Windows 7 O/S

Color Touch Screen Flat Panel Display

Process parameter flexibility is maintained in a controlled and repeatable manner through system software

Factory Mutual FM4910 approved plastics utilized for major assemblies

Molded Spin Sink (SRD)

Improved DI\Chemical Dispense Module.

5-Finger Wafer Gripper Standard

Universal Lifter Tip / 100-200mm, 600,800,1000,1200 Micron thickness options

Consistent w/ Legacy consumables

220VAC UL Listed

CE marked electrical enclosure


Buyer is responsible for shipping charges from our Boston, MA location


We can quote skidding, packaging, crating, and shipping to countries overseas by boat or airplane


Please let us know if you have any questions or concerns