MKS Mass-Flo® Controller 1179A01323CS15V – 2000 SCCM, RS-485, ¼” Swagelok, Viton, NC, CO2

This listing is for an MKS 1179A01323CS15V Mass Flow Controller. This model belongs to the trusted 1179A series, known for high-accuracy gas mass flow measurement and control in laboratory and industrial environments. Designed with a digital RS-485 interface, this unit is ideal for modern systems requiring serial communication. The model is configured for a full-scale flow rate of 2000 SCCM (N₂ equivalent), Viton seals, ¼" Swagelok tube fittings, and a normally closed valve configuration.

• Model: 1179A01323CS15V
• Full Scale Range: 2000 SCCM (code 23C)
• Valve Configuration: Normally Closed (code 1)
• Fittings: ¼" Swagelok (code S)
• Connector Type: Digital RS-485 (code 5)
• Seals: Viton (code V)
• Communication: RS-485 Digital

Performance Specifications

• Accuracy: ±1% of full scale
• Repeatability: ±0.2% of full scale
• Resolution: 0.1% of full scale
• Control Range: 2% to 100% of full scale
• Response Time: <2 seconds to 2% of set point
• Maximum Inlet Pressure: 150 PSIG
• Operational ΔP: 10–40 PSID
• Temperature Range: 0°C to 50°C
• Storage Temperature: -20°C to 50°C
• Warm-up Time: 2 minutes
• Power: ±15 VDC (±5%), 200 mA startup, 100 mA typical steady state
• Output Signal: 0–5 VDC

Design & Build

• Flow Sensor: Advanced laminar bypass with precision sensor tube
• Valve Type: Electromagnetic, normally closed
• Materials Wetted: 316L Stainless Steel, Viton®
• Leak Integrity: <1 x 10⁻⁹ scc/sec He external
• Internal Volume (500 sccm unit): 0.27 in³
• Weight: ≤1.9 lbs (0.86 kg)
• Dimensions: Approx. 5.5” H x 1.5” W x 3” L
• Connector: RS-485 digital communication
• CE compliant (when installed with proper shielded cables)

Ideal for integration in semiconductor process systems, gas distribution, analytical instruments, and R&D environments. The digital interface enables easy system integration and long-distance control.

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