This is a brand new MFC controller, sealed in original OEM packaging with inspection report included from the manufacturer Horiba. If there are any problems with this unit, please don't hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help.
The SEC-Z700X Series is equipped with reliable thermal sensors and Pressure Insensitive function for stable flow rate control. On-board pressure measurement reduces the cost, size and complexity of gas delivery systems.
- Multi Gas / Multi Range function
The gas type and full scale flow rate can be changed by the customer. - Variable PID function gives high speed response (within 1 sec) across the whole flow range.
- Compact gas line
No need for the regulator, transducer and filter. - Stable control of the gas flow without effect by upstream and downstream pressure fluctuations.
- Integrated Inlet Pressure Sensor.
- On board Multi display.
- Warranty 1% Set Point high accuracy.
- Ultra clean design - Metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
- Compact size
Same fitting to fitting dimension up to 50 SLM. - Signal compatibility
Analog/RS485 Digital Model , DeviceNet™ Model. - Network function
Controlled by digital signal.
Pressure Insensitive
A new high-performance function provides a simplified gas supply systems. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations. SEC-Z700X Series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. They not only give a flow rate output but also the temperature and pressure readings.