This unit was double sealed.  One package opened for inspection and calibration information, item is still sealed.  Please message us if you have any questions or need any additional information or pictures.

Manufacturer: Brooks Instrument

Model: 5850EMF

Part/reference number: 1083067

Additional reference: SFE201000446

Serial number: 0101100192712004

Type: Metal-sealed mass flow controller

Gas: Nitrogen (N₂)

Full-scale flow: 1 SLPM / 1,000 SCCM

Input signal: 0–5 V

Output signal: 0–5 V

Power supply: ±15 VDC

Valve type: Normally closed

Valve-seat material: Viton

Seal material: Metal

Required calibration orientation: Vertical, flow downward

Reference conditions: 0°C at 760 mmHg

Customer inlet pressure: 200 Torr

Customer outlet pressure: 70 Torr

Gas conversion factor: 1.000

Calibration inlet pressure: 1 PSIG

Calibration outlet pressure: 0 PSIA

Calibration date: April 28, 2010

Calibration location: Sunnyvale, California

Stated accuracy: 1% of full scale

Calibration result: All tested points passed

Leak test: 1 × 10⁻¹⁰ atm-cc/sec helium

mao